Used robotics

Mattson Aspen III, Front End Transfer Chamber, Robot, Controller

• Manufacturer: Mattson

Used, parts, Transfer module 12" wafer

Axcelis Fusion G03 Ozone Asher. Dual chamber, Dual robot arm

• Manufacturer: Axcelis

8inch wafer Used

Verteq Wet Bench Nitride Etch, robot arm

• Manufacturer: Verteq

Used, looks complete, very clean 8" wafer

Verteq Wet Bench Oxide Etch, robot arm

• Manufacturer: Verteq

Used, looks complete, very clean 8 inch wafer

Axcelis Fusion 200ACU Asher. Dual robot arm

• Manufacturer: Axcelis

Used, looks complete, very clean 8 inch wafer

APPLIED ROBOTICS INC O-Ring 0106-P18N USED

• Manufacturer: APPLIED ROBOTICS INC

1.364 ID X .07 70 BUNA Expedited shipping services are available This piece is located at Ideal Machinery, Inc. on our showroom floor. Located at: 10230 N. Holly Rd, Holly MI 48442 Your inspection is invited a...

Axcelis Fusion G03 Ozone Asher. Dual chamber, Dual robot arm

• Manufacturer: Axcelis

8inch wafer Used

Ulvac Enviro Downstream Microwave Asher

• Manufacturer: Ulvac
• Model: Enviro

Ulvac Enviro Downstream Microwave Asher consisting of:- Single Chamber Advanced Strip System - Currently Configured for 6" Wafers - Computer- ENI OEM-6B RF Generator- 5 MFCs- Brooks Robot- Edwards IQ Pump/Blower-...

MicroTech Solvent Wet Bench

MicroTech Solvent Wet Bench consisting of:- 2 IPA Tanks- 2 Process Tanks - Megasonic Tank w/ Recirculation - Ultrasonic Tank w/ Recirculation- Capable of Processing 6 & 8" Wafers- Robotic Handling- Vintage: Appro...

1993 Gasonics L 3200 Asher, 4", 6"

• Manufacturer: GaSonics

- 2 quartz vacuum chambers - RF power supply - Mass flow controlled gas delivery system - Roughing pumps and pressure control systems (throttle valves) - Electronics control system - Automated robotic wafer ...

2011 DNS WS 820 L

• Manufacturer: Dainippon Screen
• Model: WS-820L

- Automated Alpha Tool (Double Sided Porous Silicon: 25 wafer batch) - Wafer Flow Left to right - Cassette included Components to include: - Main body - Loader / Unloader - Two robots for bath to bath trans...

Ulvac Enviro Downstream Microwave Asher

• Manufacturer: Ulvac
• Model: Enviro

- Single Chamber Advanced Strip System - Computer - ENI OEM-6B RF Generator - 5 MFCs - Brooks Robot - Edwards IQ Pump/Blower - Manuals

2000 ULVAC Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

• Manufacturer: Ulvac
• Model: Enviro

- Part No: Enviro 1 - Date of Manufacture: 08/23/2000 - Gases Used: NF3, H2/N2, CF4 and O2 Included Components - Main Body with Load Lock - System Control Computer Part No: E4200 - Brooks Automation Robot Part ...

DNS Dainippon Screen MFI PLC Control Module Mitsubishi Q63P MELSEC FC-3000 Spare

• Manufacturer: Dainippon Screen
• Model: FC-3000

“Removed from a DNS Dainippon Screen FC-3000 Wet Station System” DNS Dainippon Screen MFI PLC Control Module Mitsubishi Q63P MELSEC FC-3000 Spare Inventory # A-15178 MFI 001n Removed from a DNS Dainippon Screen F...

DNS Dainippon Screen MEK PLC Control Module Mitsubishi Q63P MELSEC FC-3000 Spare

• Manufacturer: Dainippon Screen
• Model: FC-3000

“Removed from a DNS Dainippon Screen FC-3000 Wet Station System” DNS Dainippon Screen MEK PLC Control Module Mitsubishi Q63P MELSEC FC-3000 Spare Inventory # A-15179 MFI 002n Removed from a DNS Dainippon Screen F...