Used flow robotics in Germany

2016 LAM Research Corp. WETV18-04

• used

• Manufacturer: Lam Research - Novellus

SEZ 304 Minimum: 150 mm | Maximum: 300 mm | Set size: 300 mm | Number of robots: 1 | Tank material: PVDF | Automatic wafer transfer: YES | Controller type: Microprocessor Controller Type | Other information: the ...