New Metrology / Inspection (Semiconductors) in Japan

HORIBA, Ltd. Xtrology

• Manufacturer: Horiba

Fully Automated Thin Film Inspection System Combines multiple sensors and automation technology to provide increased value for semiconductor wafer inspection The new product, "Xtrology," Fully Automated Thin Film...

PLATO Series

Photoluminescence Mapping System The PLATO Series, Photoluminescence Mapping System, is a compound wafer defect inspection device utilizing the photoluminescence (PL) method. It can measure spectral characteristi...

MiPLATO-SiC

SiC Wafer Defect Inspection System The SiC Wafer Defect Inspection System MiPLATO-SiC is a PL mapping system optimized for SiC wafers. It acquires the spectrum of the entire wafer in a short time using spiral map...

HORIBA, Ltd. PD10

• Manufacturer: Horiba

Reticle / Mask Particle Detection System Next-generation inspection platform to meet future needs PD10 is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platf...

HORIBA, Ltd. PD10-EX

• Manufacturer: Horiba

Reticle / Mask Particle Detection System Complete particle detection and removal with one machine for enhanced efficiency and yield improvement in semiconductor manufacturing processes Since its launch in 1984, t...

OPM Series

Optical Property Measurement System OPM Series is a High-Speed Optical Measurement System for Camera Filter Inspection. By automatically exchanging multiple samples and adjusting the incident angle, it measures s...

PyroSense Series

more In-Situ Monitoring System The PyroSense Series is an in-situ monitoring system for epitaxial growth processes in MOCVD/MBE. It enables inline monitoring of temperature, film thickness (growth rate), and warp...

PLATO-MicroScan

• Manufacturer: Microscan

Micro Photoluminescence Mapping System PLATO-MicroScan is a microscopic PL mapping system that integrates an objective lens onto the PLATO series platform. This objective lens-based micro photoluminescence mappin...

HORIBA, Ltd. RP-1

• Manufacturer: Horiba

Reticle/Mask Particle Remover The RP-1 automatically removes particles from the reticle/mask by air (or N2) and vacuum suction. Routinely removing the particles before the lithography process extends the replacem...