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Used robotics

  • Trusted Seller
    Novellus 99-0339 Aura A2000LL Plasma

    Novellus 99-0339 Aura A2000LL Plasma Asher Stripper GaSonics Non-Copper Surplus

    • Manufacturer: Lam Research - Novellus

    - Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked Installed Components - Load Lock Chamber Part No: A01-218-01 - Asyst Technologies Indexer Elevator Part No: 0...

    United States
  • Trusted Seller
    GASONICS 99-0339 Plasma Asher Stripper

    GASONICS 99-0339 Plasma Asher Stripper Aura A2000LL Novellus A95-053-02 As-Is

    • Manufacturer: GaSonics

    - Part No: 99-0339 - Model No: A2000LL - Diagram No: 99-2884 - AURA 2000-LL - Non-Copper - CE Marked - Sold As-Is Installed Components - Load Lock Chamber Part No: A95-053-02 - Asyst Technologies Indexer Elevat...

    United States
  • Trusted Seller
    1999 Mattson Aspen II ICP

    1999 Mattson Aspen II ICP

    • Manufacturer: Mattson

    Main frame. Cables 64*76*78 AC power rack 26*18*66 Utility box 25*20*75 RF rack 22*26*55 Chiller. Cables 33*25*55 Transformer 24*24*30 Parts box-1 : spare parts, Tool Manual 28*20*16 Parts box-2 : spare pa...

    United States
  • Trusted Seller
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    Festo Flat Panel Display glass substrate transfer robot

    • Manufacturer: Festo

    Festo Flat Panel Display glass substrate transfer robot Flat Panel Display glass substrate transfer robot

    Bree, Ireland
  • Plasmatherm SLR720 shuttle lock RIE

    Plasmatherm SLR720 shuttle lock RIE for compound semiconductor etching

    • Manufacturer: Plasma-Therm
    • Model: SLR-720

    Plasmatherm SLR-720 RIE tool Configured for etching of metals and compound semiconductors Previous usage was etching of GaAs with chlorine chemistry PC controller. Vacuum load lock with wafer transfer robot. ...

    $75,000 USD
    San Jose, CA
  • GaSonics PEP 3510A/A Dual Chamber

    GaSonics PEP 3510A/A Dual Chamber

    • Manufacturer: GaSonics

    The GaSonics PEP 3510A is a versatile microwave downstream photoresist removal system, designed for clean, damage-free removal of photoresist. PEP 3510A utilizes a combination of platen and lamp wafer heating res...

    San Jose, CA
  • GaSonics L3510 Single Wafer Ashing

    GaSonics L3510 Single Wafer Ashing System

    • Manufacturer: GaSonics

    The GaSonics L3510 is a versatile downstream photoresist removal system, designed for clean, damage-free removal of the most difficult resist structures. Utilizing the production-proven L-Series platform, the L35...

    San Jose, CA
  • Plasmatherm SLR 770 shuttle lock

    Plasmatherm SLR 770 shuttle lock ICP inductively coupled plasma etch system for compound semiconductor process

    • Manufacturer: Plasma-Therm
    • Model: SLR

    Plasmatherm SLR-770 ICP Shuttle Lock Inductively Coupled Plasma Etch System. Configured for etching of metals and compound semiconductors Previous usage was deep etching of GaAs with chlorine chemistry PC cont...

    $110,000 USD
    San Jose, CA
  • Trusted Seller
    DNS WS-820L Automated wafer cleaning

    DNS WS-820L Automated wafer cleaning system

    • Manufacturer: Dainippon Screen
    • Model: WS-820L

    DNS WS-820L Automated wafer cleaning system 2011 4 robots Condition: Complete like new working condition, only used during acceptance, no production. No de-installed and in storage. Click below link for video: Vi...

    Trim, Ireland
  • Trusted Seller
    TEL U2e-655II upgraded to U2e-855II

    TEL U2e-655II upgraded to U2e-855II Oxide Etcher

    • Manufacturer: Tokyo Electron - TEL

    TEL U2e-655II upgraded to U2e-855II Oxide Etcher For sale is a TEL U2e-655II upgraded to U2e-855II Oxide Etcher. It is located in Asia. Please check below for the configuration. Configuration: 1) MFC(MASS FLOW CO...

    Trim, Ireland
  • Trusted Seller
    Kensington CSMT-4 200mm Wafer Sorter

    Kensington CSMT-4 200mm Wafer Sorter

    • Manufacturer: Kensington

    Kensington CSMT-4 200mm Wafer Sorter This Kensington CSMT-4 200mm Wafer Sorter is used surplus and is being sold as is. It was uninstalled from a fab in working condition, however, has not been tested since. It i...

    Trim, Ireland
  • Trusted Seller
    2005 LAM Rainbow TCP 9600SE

    2005 LAM Rainbow TCP 9600SE II standalone with DSQ - 150mm Plasma Etch

    • Manufacturer: Lam Research - Novellus
    • Model: TCP 9600SE

    LAM Rainbow TCP 9600SE II standalone with DSQ - Plasma Etch Vintage: 2005+/-5j Wafersize: 150mm 200mm convertible: Yes Former BelGaN process: metalpets TECHNICAL SPEC FOR Etch tool System Model: LAM Rainbow...

    Europe
  • Trusted Seller
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    Akrion UP-V2 HL2000

    • Manufacturer: Unknown

    Akrion UP-V2 HL.2000 AKRION UP-V2 HL.2000 3 Tank Semiautomatic Chrome Etch Station w/Linear Robotic Transfer

    Bree, Ireland
  • Trusted Seller
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    AKRION V2-HL.2000 Acid Wet Station

    • Manufacturer: AKRION

    Hybrid-Linear Automatic Acid Wet Station with Robotic Transfer (New), for Dual 150mm Cassettes

    Trim, Ireland
  • Trusted Seller
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    StripperAsher

    • Manufacturer: Unknown

    System de-installed on 23-May-14. System still located at its Fab location. Process: Etch-Ashing Wafer Handling Configuration -Full batch/ single wafer: Single wafer -Robot: Yaskawa robot -Robot blade: Dual blade...

    Bree, Ireland
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