Used Etching Systems

Hitachi M-712 Plasma Etcher PSU for Chamber Qty 2 Available

• Manufacturer: ASML

Qty 2 Available

Tegal CD1151-00102 Plasma Etcher

• Manufacturer: Tegal

Rena Casstte Spray Etcher

• Manufacturer: Rena

150mm (without Semitool SRD)

ICP Etch

• Manufacturer: Unknown

STS ICP

ICP Etch

• Manufacturer: Unknown

STS ICP

Polysilicone Etch

• Manufacturer: Unknown

Tool will be removed to a storage room from clean room on January 6th, 2015. Three chambers (A, B and D) were transferred to another Fab and are not available. Confirmed with Fab 15 there are missing & broken par...

Lam Aluminum Etching System

• Manufacturer: Unknown

Lam Aluminum Etching System Aluminum Etching System

Scientech Oxide Etch

• Manufacturer: Unknown

Scientech Oxide Etch Oxide Etch

Mattson Wet Etch tool

• Manufacturer: Mattson

Mattson Wet Etch tool Wet Etch tool

Mega Kinetics Chemical Delivery System for Electo Plate Etch tools

• Manufacturer: Unknown

Mega Kinetics Chemical Delivery System for Electo Plate / Etch tools Chemical Delivery System for Electo Plate / Etch tools

Sosul Extrima 3100 Bevel Etch

• Manufacturer: Unknown

Sosul Extrima 3100 Bevel Etch 300mm

Sankyo WET Oxide Etch Bench

• Manufacturer: Sankyo

Sankyo WET Oxide Etch Bench WET Oxide Etch Bench

Pathways Wet deck for etching off material 6

• Manufacturer: Unknown

Pathways Wet deck for etching off material 6″

Reynoldstech Stainless Steel Pourous Silicon Etch Wet Bench

• Manufacturer: ReynoldsTech

Reynoldstech Stainless Steel Pourous Silicon Etch Wet Bench

Corial 300IL ICP Dry Etcher System

• Manufacturer: Corial

Corial 300IL ICP Dry Etcher System Tray size is 14inches N2,H2,O2, Gases