Used Etching Systems in South Korea

1998 TEL UNITY85DD

• Manufacturer: Tokyo Electron - TEL

1995 TEL UNITY85DM［SiO2 ZL］

• Manufacturer: Tokyo Electron - TEL

Canon MAS-8220

• Manufacturer: Canon
• Model: MAS-8220

2005 Hitachi High-Technologies M-632A

• Manufacturer: Hitachi

1997 Hitachi High-Technologies M-632A

• Manufacturer: Hitachi

1995 TOK TCE3822

• Manufacturer: TOK

LAM 2300 VERSYS

• Manufacturer: Lam Research - Novellus
• Model: 2300 VERSYS

Wafer size: 8"

LAM 2300 EXELAN

• Manufacturer: Lam Research - Novellus
• Model: 2300 EXELAN

Wafer size: 8"

LAM 2300 STAR

• Manufacturer: Lam Research - Novellus

Wafer size: 8"

ULTIMA3 ASHER

• Manufacturer: ULTIMA3

AXCELIS/FUSION 200ACU

• Manufacturer: Axcelis

Mattson Technology, Inc. Helios

• Manufacturer: Mattson
• Model: HELIOS

Wafer size: 12"

Sosul Extrima 3100

• Manufacturer: Sosul

Wafer size: 12"

Tokyo Electron Ltd. Telius 305 SCCM

• Manufacturer: Tokyo Electron - TEL
• Model: TELIUS 305 SCCM

Wafer size: 12"

Topcon EBS3000

• Manufacturer: Topcon

Wafer size: 12"