Used Etching Systems in Gyeonggi-do, South Korea

TelPla AG200

PVA TePLA AG 200, 2INCH~6INCH, Plasma Asher S/N : 1071, 78 Net dimensions and weight : 540*600*360mm / 60Kg Please find attached PDF format for more details.

M/PLEX ICP AL

STS M/PLEX AL ETCHER Please find attache PDF format for more details.

M/PLEX ICP SI

STS M/PLEX ICP SI ETCHER, 6INCH Please find attached PDF format for more details.

NOVELLUS PEP3510

• Manufacturer: Lam Research - Novellus

Novellus GASONICS PEP3510 IRIDIA DL(S) DUAL Process : Asher, Wafer Size : 200mm SYSTEM Configuration is as attached PDF format. Missing Items as below. - YASKAWA XU-RCM 4700 : Missing. - ASTEK D13765, Q'TY : 1, L...

Unaxis VERSALINE ICP(DSE-III)

• Manufacturer: Unaxis

Plasmatherm Unaxis ICP Etcher 6inch ESC Chuck VERSALINE - Loadlock Chamber & Transfer Chamber 6inch Cassette Type - Process Chamber 6inch ESC Chuck Type - RF Generator Module. - Monitor Rack - Chiller Unit S/N ...

LAM TORUS 300K

• Manufacturer: Lam Research - Novellus
• Model: TORUS 300K

APPLIED MATERIALS ENABLER_E2

• Manufacturer: Amat
• Model: ENABLERE2

Centura AP, AMAT ENABLER, ETCH, 300MM VINTAGE : 2009-12 Note : Missing EFEM UNIT

GASONICS GASONIC L3510

• Manufacturer: GaSonics

GASONIC L3510 Single Wafer Downstream Photoresist Asher 8” configured (can change to 6” ) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber ...

LAM TORUS 300S

• Manufacturer: Lam Research - Novellus
• Model: TORUS 300S

MATTSON MATTSON PARADIGME

• Manufacturer: Mattson

Mattson PARADIGME_SI, Etcher Serial No. MEOO72 Wafer Size: 300mm, Wafer of Notch

2006 TEL Telius SCCM

• Manufacturer: Tokyo Electron - TEL
• Model: TELIUS SCCM

Wafer size: 12”

2005 LAM / Novellus C2 Dual Sequel Express

• Manufacturer: Lam Research - Novellus

Wafer size: 8”

Wintel Poly Etcher

• Manufacturer: Wintel

LPR (Low-Pressure Removal) PE ALD Poly Etcher HARC Doped ACL EER EUV Application : DPT, QPT, Hard mask etch etc. Excellent Uniformity ＜1% (Concentric profile) Improved wafer edge uniformity : Wide plasma generati...

PSK Inc. PSK 300mm Etcher MKS Micr

• Manufacturer: PSK Inc.

MAKER : PSK INC. MODEL : PSK TERA21RC Etcher CHAMBER Description PSK TERA21RC Etcher CHAMBER included MKS Microwave Source (Plasma Subsystem) with Generator Rack(MKS FI20160-1 2ea) ASTEX FI20608 ...