- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
HITACHI KOKUSAI ELECTRIC VERTEX-Ⅲ(F)
- Manufacturer: Hitachi
Vertical Diffusion Furnace (Low Temp Anneal) Wafer size: 200mm
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
AMAT Centura 5200 RTP
- Manufacturer: Amat
- Model: Centura
Narrow Body Loadlock Chamber / RTP XE Chamber * 2 / HP+ Robot / System Controller / AC Power Box
Yongin-si, South KoreaAMAT Centura 5200 RTP (RTAga)
- Manufacturer: Amat
- Model: Centura
Two MOD1 chambers, POR2 Probes; position A and B Wafer size: 200mm
Yongin-si, South KoreaAG Associates 610
- Manufacturer: AG Associates
- Model: 610
Benchtop Rapid Thermal Anneal Tool with Gas Control Box
Yongin-si, South KoreaAMAT Mirra
- Manufacturer: Amat
- Model: MIRRA
Process : PCCMP Chm Position 1 Platen 1 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 2 Platen 2 slurry POUs Slurry / DIW / Hi-PHDIW Chm Position 3 Platen 3 slurry POUs Slurry / DIW / Hi-PHDIW
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea