Used Mass Flow Controllers in Tokyo, Japan

Horiba Stec Stec SEC-410

Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-7330M

Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:HE Flow:20SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK3-UL

Flow: 1 SLM Gas: H2 Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400RC

Gas: CHF3 Flow: 100 CCM Device name: Mass flow controller (MFC)

Tylan FC-780C

Gas:H2 Flow rate:3SLM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: AR Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1100

• Manufacturer: United Forms Corp

Gas:N2 Flow rate:5SLM Device name: Mass flow controller (MFC)

Horiba Stec SEC-400MK3-K

Gas: SiH4 Flow: 2LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2 Flow: 3LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-510A

Gas:N2 Flow rate:50LM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-500MK3

• Manufacturer: Horiba

Gas:N2 Flow rate:10LM Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)