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Used Plasma Etching (Dry Etching) in South Korea

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    1997 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Metal, 1CH Wafer size: 150mm

    Yongin-si, South Korea
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    1998 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Plasma Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    HITACHI M-308

    • Manufacturer: Hitachi
    • Model: M-308

    AL Etcher Wafer size: 8"

    Yongin-si, South Korea
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    Hitachi M-602A

    • Manufacturer: Hitachi
    • Model: M-602A

    AL Etcher Wafer size: 8"

    Yongin-si, South Korea
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    HITACHI M-501

    • Manufacturer: Hitachi
    • Model: M-501

    AL Etcher Wafer size: 8"

    Yongin-si, South Korea
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    Hitachi M-308

    • Manufacturer: Hitachi
    • Model: M-308

    Metal Etcher

    Yongin-si, South Korea
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    HITACHI M-501

    • Manufacturer: Hitachi
    • Model: M-501

    AL Etcher

    Yongin-si, South Korea
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    1999 Hitachi M-511A

    • Manufacturer: Hitachi
    • Model: M-511A

    Poly Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    2012 HITACHI M8170 XT

    • Manufacturer: Hitachi
    • Model: M-8170XT

    Wafer size: 12

    Yongin-si, South Korea
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    HITACHI M-602

    • Manufacturer: Hitachi
    • Model: M-602

    AL Etcher Wafer size: 8"

    Yongin-si, South Korea
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    Hitachi M-602A

    • Manufacturer: Hitachi
    • Model: M-602A

    AL Etcher Wafer size: 8"

    Yongin-si, South Korea
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    Hitachi M-602A

    • Manufacturer: Hitachi
    • Model: M-602A

    AL Etcher Wafer size: 8"

    Yongin-si, South Korea
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    Hitachi M-501

    • Manufacturer: Hitachi
    • Model: M-501

    RIE (AL-Si/TiW)

    Yongin-si, South Korea
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    HITACHI M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    AL Dry Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    HITACHI M-308

    • Manufacturer: Hitachi
    • Model: M-308

    AL Etcher Wafer size: 8"

    Yongin-si, South Korea
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