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Used Deposition Equipment (Cvd, Pvd) in South Korea

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    TEL UNITY-EP

    • Manufacturer: Tokyo Electron - TEL
    • Model: UNITY-EP

    Process Module 3 TiN/Ti-CVD Wafer size: 8"

    Yongin-si, South Korea
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    AMAT Producer

    • Manufacturer: Amat
    • Model: Producer

    Producer Standard / SACVD 3 Twin chambers Wafer size: 200mm

    Yongin-si, South Korea
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    EMCORE E300

    • Manufacturer: EMCORE

    MOCVD

    Yongin-si, South Korea
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    Questor Technology APT-5800i

    • Manufacturer: Questor Technology

    TEOS Ozone DVD System

    Yongin-si, South Korea
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    1999 AMAT P-5000

    • Manufacturer: Amat
    • Model: P5000

    P-TEOS(HOTbox) 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    1992 AMAT P-5000

    • Manufacturer: Amat
    • Model: P5000

    SiO2(3CH) Wafer size: 200mm

    Yongin-si, South Korea
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    AMAT Centura 5200

    • Manufacturer: Amat
    • Model: Centura

    Ultima Wafer size: 200mm

    Yongin-si, South Korea
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    Oxford 800

    • Manufacturer: Oxford

    PECVD

    Yongin-si, South Korea
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    AMAT P5000 TEOS

    • Manufacturer: Amat
    • Model: P5000

    2 Chambers TEOS Wafer size: 200mm

    Yongin-si, South Korea
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    STS 310PC

    • Manufacturer: STS

    PECVD system

    Yongin-si, South Korea
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    AMAT Centura (ver. TES)

    • Manufacturer: Amat
    • Model: Centura

    ACL process Wafer size: 200mm

    Yongin-si, South Korea
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    2001 AMAT Centura 5200 WxZ

    • Manufacturer: Amat
    • Model: Centura

    Wafer size: 200mm

    Yongin-si, South Korea
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    AMAT CENTURA DxZ, SMIF

    • Manufacturer: Amat
    • Model: Centura

    Wafer size: 200mm

    Yongin-si, South Korea
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    1990 AMAT P-5000

    • Manufacturer: Amat
    • Model: P5000

    Yongin-si, South Korea
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    1993 AMAT P-5000

    • Manufacturer: Amat
    • Model: P5000

    Yongin-si, South Korea
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