Used Mass Flow Controllers in Tokyo, Japan

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

• Manufacturer: Horiba

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Aera FC-780C

Flow rate: 5SCCM Gas: O2 Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-310

Gas: 20% SiH4/He Flow: 2 L/min Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400MC

Gas: BCI3 Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-4400RC

• Manufacturer: Horiba

Gas: CHF3　Flow rate: 200 CCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Unit UFC-1200

• Manufacturer: United Forms Corp

Gas: O2 Flow rate: 20 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-410Z

• Manufacturer: Horiba

Gas: SiH4 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-421

Gas: SF6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

MKS M100B02852CS1BV

Gas: CH4 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

MKS M100B00752CS1BV

Gas: H2 Flow rate: 500 SCCM Device name: Mass flow controller (MFC)

Tylan FC-260

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)